Facilities
The NEST Group has a wide range of state-of-the-art fabrication, characterisation and testing equipment at its disposal, housed in specialist clean-rooms, laser and materials laboratories. A summary of major facilities is given below.
Materials fabrication
- Nordiko (6") multi-target RF/DC sputtering system
- Moorefield NanoPVD RF/DC sputtering system
- Purpose-built (2") multi-target sputtering system
- 6xCVD tube furnaces (from 1000-1800C)
- Moorefield plasma-enahanced CVD system
- Moorefield NanoCVD system
- Kurt J Lesker Evaporation System
- HHV Auto306 Thermal Evaporator
- Electrochemistry (electroplating) work-station
- Carbolite Muffle furnace
- FCT hot-press ceramics fabricator (25 tonne, 2200C)
- Jiplec Rapid Thermal Annealing System (to 1200C)
Device fabrication
- NanoBeam NB4 Electron Beam System
- Durham Magneto Optics Microwriter ML Laser writer
- xT Nova Nanolab 600 FIB (focused ion beam milling machine)
- Karl Suss MJB4 Optical Mask Aligner
- Kloe UV-Kub 2 masking optical system
- JLS Designs RIE 80 Etching System
- Moorfield Nano ETCH
- LoadPoint Micro Ace 3 Dicing Saw
- K&S 4123 and 4700 Wire Bonders
- Critical Point Drier
Materials and device characterisation
- Bruker Advance X-ray diffractometer and reflectometer
- Bruker Veeco Innova SPM with CAFM, MFM, EFM and STM modes
- Horiba TERS Raman system
- JASCO Microspectrophotometer
- MDC cryogenic probe test-station
- Janis CTI-22 closed-circuit He optical cryostat
- TA Instruments Ltd Q600 TGA
- Quantachrome Gas Sorption Analyser (BET)
- Fisher Scientific Vis/UV spectrometer
- Nikon LV150 Upright Microscopes
- KLA-Tencor D-100 Surface Profiler
- TESCAN VEGA3 Scanning Electron Microscope
- JEOL 2100 TEM/STEM
- X-Tek X-ray computer tomography (CT) system
- Solar cell testing workstation